Fabrication of GRIN microstructures by two-photon lithography
- 作者: Aparin M.D.1, Baluyan T.G.1, Sharipova M.I.1, Sirotin M.A.1, Lyubin E.V.1, Soboleva I.V.1, Bessonov V.O.1, Fedyanin A.A.1
- 
							隶属关系: 
							- Lomonosov Moscow State University
 
- 期: 卷 87, 编号 6 (2023)
- 页面: 807-812
- 栏目: Articles
- URL: https://rjpbr.com/0367-6765/article/view/654377
- DOI: https://doi.org/10.31857/S0367676523701405
- EDN: https://elibrary.ru/VKYZQG
- ID: 654377
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详细
The method of two-photon lithography is used to fabricate GRIN microstructures. Test rectangular structures with sizes 25 × 25 × 3 micrometers were used with varying laser intensity by linear or gaussian distribution in one dimension. The resulting refractive index has been tuned in the range of 0.03. The suggested method can be applied to produce arbitrarily shaped 3D GRIN micro-optical elements.
作者简介
M. Aparin
Lomonosov Moscow State University
							编辑信件的主要联系方式.
							Email: aparin@nanolab.phys.msu.ru
				                					                																			                												                								Russia, 119991, Moscow						
T. Baluyan
Lomonosov Moscow State University
														Email: aparin@nanolab.phys.msu.ru
				                					                																			                												                								Russia, 119991, Moscow						
M. Sharipova
Lomonosov Moscow State University
														Email: aparin@nanolab.phys.msu.ru
				                					                																			                												                								Russia, 119991, Moscow						
M. Sirotin
Lomonosov Moscow State University
														Email: aparin@nanolab.phys.msu.ru
				                					                																			                												                								Russia, 119991, Moscow						
E. Lyubin
Lomonosov Moscow State University
														Email: aparin@nanolab.phys.msu.ru
				                					                																			                												                								Russia, 119991, Moscow						
I. Soboleva
Lomonosov Moscow State University
														Email: aparin@nanolab.phys.msu.ru
				                					                																			                												                								Russia, 119991, Moscow						
V. Bessonov
Lomonosov Moscow State University
														Email: aparin@nanolab.phys.msu.ru
				                					                																			                												                								Russia, 119991, Moscow						
A. Fedyanin
Lomonosov Moscow State University
														Email: aparin@nanolab.phys.msu.ru
				                					                																			                												                								Russia, 119991, Moscow						
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