Мақаланы E-mail арқылы жіберу Preparation of Single-Crystal Zinc Oxide Films on a Metal Sublayer
- Авторлар: Luzanov V.A.1
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Мекемелер:
- Kotelnikov Institute of Radioengineering and Electronics, Fryazino Branch
- Шығарылым: Том 68, № 5 (2023)
- Беттер: 470-471
- Бөлім: НАНОЭЛЕКТРОНИКА
- URL: https://rjpbr.com/0033-8494/article/view/650531
- DOI: https://doi.org/10.31857/S0033849423050108
- EDN: https://elibrary.ru/UHVBOK
- ID: 650531
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Аннотация
To increase the efficiency of devices based on piezoelectric transducers made of zinc oxide, it is proposed to use single-crystal layers of platinum as the bottom electrode. Epitaxial single-crystal films of zinc oxide on metal have been obtained. It is shown that this combination of layers makes it possible to minimizethe mismatch in the lattice parameters of the film and substrate, which significantly improves the quality of the obtained piezoelectric film.
Негізгі сөздер
Авторлар туралы
V. Luzanov
Kotelnikov Institute of Radioengineering and Electronics, Fryazino Branch
Хат алмасуға жауапты Автор.
Email: valery@luzanov.ru
Fryazino, Moscow oblast, 141190 Russia
Әдебиет тізімі
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- Morales C., Leinen D., del Campo A. et al. // J. Alloys and Compounds. 2021. V. 884. Article No. 161056.
- Franklin J.B., Zou B., Petrov P. et al. // J. Material Chemistry. 2021. V. 21. № 22. P. 8178.
- Steiger P., Zhang J., Harrabi K. et al. // Thin Solid Films. 2018. V. 645. P. 417.
