Enviar artigo por via de e-mail Preparation of Single-Crystal Zinc Oxide Films on a Metal Sublayer
- Autores: Luzanov V.A.1
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Afiliações:
- Kotelnikov Institute of Radioengineering and Electronics, Fryazino Branch
- Edição: Volume 68, Nº 5 (2023)
- Páginas: 470-471
- Seção: НАНОЭЛЕКТРОНИКА
- URL: https://rjpbr.com/0033-8494/article/view/650531
- DOI: https://doi.org/10.31857/S0033849423050108
- EDN: https://elibrary.ru/UHVBOK
- ID: 650531
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Resumo
To increase the efficiency of devices based on piezoelectric transducers made of zinc oxide, it is proposed to use single-crystal layers of platinum as the bottom electrode. Epitaxial single-crystal films of zinc oxide on metal have been obtained. It is shown that this combination of layers makes it possible to minimizethe mismatch in the lattice parameters of the film and substrate, which significantly improves the quality of the obtained piezoelectric film.
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Sobre autores
V. Luzanov
Kotelnikov Institute of Radioengineering and Electronics, Fryazino Branch
Autor responsável pela correspondência
Email: valery@luzanov.ru
Fryazino, Moscow oblast, 141190 Russia
Bibliografia
- Лузанов В.А., Алексеев С.Г., Ползикова Н.И. // РЭ. 2018. Т. 63. № 9. С. 1015.
- Morales C., Leinen D., del Campo A. et al. // J. Alloys and Compounds. 2021. V. 884. Article No. 161056.
- Franklin J.B., Zou B., Petrov P. et al. // J. Material Chemistry. 2021. V. 21. № 22. P. 8178.
- Steiger P., Zhang J., Harrabi K. et al. // Thin Solid Films. 2018. V. 645. P. 417.
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